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Silicon micromachining

Elwenspoek, M.C. and Jansen, H.V. (1999) Silicon micromachining. Cambridge University Press, United Kingdom. ISBN 9780521590549

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Item Type:	Book
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15570
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Metis ID: 112452

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