Materials for mechanical and optical microsystems

Reed, M.L. and Elwenspoek, M.C. and Johansson, S. and Obermeier, E. and Fujita, H. and Uenishi, Y. (1997) Materials for mechanical and optical microsystems. Materials Research Society, Pittsburgh, Pennsylvania. ISBN 9781558993488

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Item Type:	Book
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15569
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Metis ID: 112451