Materials for mechanical and optical microsystems


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Reed, M.L. and Elwenspoek, M.C. and Johansson, S. and Obermeier, E. and Fujita, H. and Uenishi, Y. (1997) Materials for mechanical and optical microsystems. Materials Research Society, Pittsburgh, Pennsylvania. ISBN 9781558993488

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112451