Materials for mechanical and optical microsystems


Reed, M.L. and Elwenspoek, M.C. and Johansson, S. and Obermeier, E. and Fujita, H. and Uenishi, Y. (1997) Materials for mechanical and optical microsystems. Materials Research Society, Pittsburgh, Pennsylvania. ISBN 9781558993488

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 112451