A two-dimensional Monte Carlo model for thin film growth by oblique evaporation: simulation of two-component systems for the example of Co-Cr
Müller-Pfeiffer, S. and Kranenburg van, H. and Lodder, J.C. (1992) A two-dimensional Monte Carlo model for thin film growth by oblique evaporation: simulation of two-component systems for the example of Co-Cr. Thin Solid Films, 213 (1). pp. 143-153. ISSN 0040-6090
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| Abstract: | Starting from the well-known idea of atomic shadowing during thin film growth (i.e. ballistic aggregation) a two-dimensional computer model is developed which includes surface relaxation by thermally induced surface diffusion and atomic attraction for a two-component system. An attempt was made to link the model interaction energies to real bonding energies in Co---Cr thin films. The model was applied to investigate structural as well as local configuration changes in the aggregates during systematic parameter variations. |
| Item Type: | Article |
| Copyright: | © 1992 Elsevier Science |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/15480 |
| Official URL: | http://dx.doi.org/10.1016/0040-6090(92)90489-X |
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