A two-dimensional Monte Carlo model for thin film growth by oblique evaporation: simulation of two-component systems for the example of Co-Cr

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Müller-Pfeiffer, S. and Kranenburg van, H. and Lodder, J.C. (1992) A two-dimensional Monte Carlo model for thin film growth by oblique evaporation: simulation of two-component systems for the example of Co-Cr. Thin Solid Films, 213 (1). pp. 143-153. ISSN 0040-6090

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Abstract:Starting from the well-known idea of atomic shadowing during thin film growth (i.e. ballistic aggregation) a two-dimensional computer model is developed which includes surface relaxation by thermally induced surface diffusion and atomic attraction for a two-component system. An attempt was made to link the model interaction energies to real bonding energies in Co---Cr thin films. The model was applied to investigate structural as well as local configuration changes in the aggregates during systematic parameter variations.
Item Type:Article
Copyright:© 1992 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15480
Official URL:http://dx.doi.org/10.1016/0040-6090(92)90489-X
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