Microstructure of co-evaporated CoCr films with perpendicular anisotropy


Kranenburg, H. van and Lodder, J.C. and Toth, L. and Popma, Th.J.A. and Maeda, Y. (1990) Microstructure of co-evaporated CoCr films with perpendicular anisotropy. IEEE Transactions on Magnetics, 26 (5). pp. 1620-1622. ISSN 0018-9464

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Abstract:Coevaporation of Co and Cr is applied to achieve good magnetic characteristics of media deposited at low temperature. The opposed oblique incidence vapor flux induces a columnar alignment parallel to the evaporation plane. Further, a process-induced segregation is present which introduces separated Co-rich and Cr-rich regions. A selective etching process is carried out to find proof of this. With increasing process temperature, nonelongated columns develop. The columnar axes are inclined towards the Co source at a smaller angle than the angle of incidence. The texture axes are also inclined, as are the anisotropy axes. The process-induced segregation results in an enhanced coercivity and saturation magnetization. A small in-plane anisotropy coincides with the direction of columnar alignment. At a higher process temperature, the column, texture, and anisotropy axis tilting decreases
Item Type:Article
Copyright:©1990 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15472
Official URL:https://doi.org/10.1109/20.104467
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