27 O 01 Aerosol reactors for thin film deposition and their application to ZnS:Cl doped films

Martin, F.J. and Albers, H. and Lambeck, P.V. and Popma, Th.J.A. (1993) 27 O 01 Aerosol reactors for thin film deposition and their application to ZnS:Cl doped films. Journal of Aerosol Science, 24 (suppl.). pp. 321-322. ISSN 0021-8502

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Item Type:	Article
Copyright:	© 1993 Elsevier Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Integrated Optical MicroSystems (IOMS)
Link to this item:	http://purl.utwente.nl/publications/15448
Official URL:	http://dx.doi.org/10.1016/0021-8502(93)90253-6
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Metis ID: 112327