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Micromechanical resonant sensors

Elwenspoek, M. (1991) Micromechanical resonant sensors. Journal A, 32 (3). pp. 15-22. ISSN 0771-1107

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Item Type:	Article
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15263
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Metis ID: 112138

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