Frequency dependence of thermal excitation of micromechanical resonators

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Lammerink, Theo S.J. and Elwenspoek, Miko and Fluitman, Jan H.J (1991) Frequency dependence of thermal excitation of micromechanical resonators. Sensors and Actuators A: Physical, 27 (1-3). pp. 685-689. ISSN 0924-4247

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Abstract:theoretical and experimental study is presented on thermal excitation of micromechanical resonators. It is shown that there is a turnover frequency, ωt, which is related to the square of the ratio of the penetration depth of the thermal wave into the structure and its thickness. For constant power dissipation at the surface of the structure, the bending moment is independent of the frequency ω at ω << ωt, while at ω >> ωt, it is proportional to ω-1. At high frequency we obtain a phase shift of -π/2. Vibration amplitudes and turnover frequencies measured on clamped beam structures agree well with the theory.
Item Type:Article
Copyright:© 1991 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15258
Official URL:http://dx.doi.org/10.1016/0924-4247(91)87071-A
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Metis ID: 112133