Microelectromechanical systems (MEMS)


Elwenspoek, M.C. (1993) Microelectromechanical systems (MEMS). Sensornieuws, 2 (2). pp. 2-9. ISSN 1386-3002

Full text not available from this repository. The author is invited to upload the full text of this publication.

Item Type:Article
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15248
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 112123