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Microelectromechanical systems (MEMS)

Elwenspoek, M.C. (1993) Microelectromechanical systems (MEMS). Sensornieuws (2:2). pp. 2-9. ISSN 13863002

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Item Type:	Article
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15248
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Metis ID: 112123

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