Micro-liquid flow sensor


Lammerink, Theo S.J. and Tas, Niels R. and Elwenspoek, Miko and Fluitman, Jan H.J (1993) Micro-liquid flow sensor. Sensors and actuators A: Physical, 37-38 . pp. 45-50. ISSN 0924-4247

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Abstract:A simple to realise micro-liquid flow sensor with high sensitivity is presented. The sensor is based on well known thermal anemometer principles. An analytical model for the sensor behaviour applicable for gas/liquid fluids is presented. The realisation process of the sensor is described. Model and experimental results agree well. The sensor is simple to integrate with other micro-liquid handling components such as pumps, mixers, etc.
Item Type:Article
Copyright:© 1993 Elsevier Science
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15244
Official URL:https://doi.org/10.1016/0924-4247(93)80010-E
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