Thermal actuation of clamped silicon microbeans

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Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Thermal actuation of clamped silicon microbeans. Sensors and Materials, 5 (3-4). pp. 217-238. ISSN 0914-4935

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Electrical Engineering, Mathematics and Computer Science (EEMCS)
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