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Thermal actuation of clamped silicon microbeans
Lammerink, T.S.J. and Elwenspoek, M.C. and Fluitman, J.H.J. (1992) Thermal actuation of clamped silicon microbeans. Sensors and Materials, 5 (3-4). pp. 217-238. ISSN 0914-4935
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| Item Type: | Article |
| Faculty: | Electrical Engineering, Mathematics and Computer Science (EEMCS) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/15241 |
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