Electrical cross-talk in two-port resonators the resonant silicon beam force sensor

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Mullem, C.J. van and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators the resonant silicon beam force sensor. Sensors and Actuators A: Physical, 31 (1-3). pp. 168-173. ISSN 0924-4247

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Abstract:An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function (j) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam force sensor with a piezoelectric driver and a piezoelectric detector is analyzed. Two solutions to reduce the level of cross-talk are presented. Proper adjustment of the value of relevant components in the sensor geometry and/or electrical interruption of the bottom electrode result in a cross-talk level close to the noise level for the frequency range of interest.
Item Type:Article
Copyright:© 1992 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15240
Official URL:http://dx.doi.org/10.1016/0924-4247(92)80099-O
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