Electrical cross-talk in two-port resonators the resonant silicon beam force sensor

Mullem van, C.J. and Tilmans, H.A.C. and Mouthaan, A.J. and Fluitman, J.H.J. (1992) Electrical cross-talk in two-port resonators the resonant silicon beam force sensor. Sensors and Actuators A: Physical, 31 (1-3). pp. 168-173. ISSN 0924-4247

Preview

PDF
495Kb

Abstract:	An important design consideration in the development of two-port resonant sensors is the electrical cross-talk between the input port and the output port. The overall transfer function (j) of the two-port sensor is equal to the vectorial sum of a transfer function representing the mechanical behavior and a transfer function representing the electrical cross-talk. The resonant silicon beam force sensor with a piezoelectric driver and a piezoelectric detector is analyzed. Two solutions to reduce the level of cross-talk are presented. Proper adjustment of the value of relevant components in the sensor geometry and/or electrical interruption of the bottom electrode result in a cross-talk level close to the noise level for the frequency range of interest.
Item Type:	Article
Copyright:	© 1992 Elsevier Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Semiconductor Components (SC) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15240
Official URL:	http://dx.doi.org/10.1016/0924-4247(92)80099-O
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Show download statistics for this publication

Repository Staff Only: item control page

Metis ID: 112115