Micro resonant force gauges

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Tilmans, Harrie A.C. and Elwenspoek, Miko and Fluitman, Jan H.J (1992) Micro resonant force gauges. Sensors and Actuators A: Physical, 30 (1-2). pp. 35-53. ISSN 0924-4247

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Abstract:A review of micro resonant force gauges is presented. A theoretical description is given of gauges operating in a flexural mode of vibration, including a discussion of non-linear effects. Gauge factor and quality factor are defined and their relevance is discussed. Performance issues such as sensitivity, stability and resolution are addressed. Design aspects, including the means for excitation and detection of the vibration, and examples of silicon microfabrication technologies are described.
Item Type:Article
Copyright:© 1992 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15238
Official URL:http://dx.doi.org/10.1016/0924-4247(92)80194-8
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Metis ID: 112113