A thermopneumatic micropump based on micro-engineering techniques

Pol van de, F.C.M. and Lintel van, H.T.G. and Elwenspoek, M. and Fluitman, J.H.J. (1990) A thermopneumatic micropump based on micro-engineering techniques. Sensors and Actuators A: Physical, 21 (1-3). pp. 198-202. ISSN 0924-4247

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Abstract:	The design, working principle and realization of an electro-thermopneumatic liquid pump based on micro-engineering techniques are described. The pump, which is of the reciprocating displacement type, comprises a pump chamber, a thin silicon pump membrane and two silicon check valves to direct the flow. The dynamic pressure of an amount of gas contained in a cavity, controlled by resistive heating, actuates the pump membrane. The cavity, chambers, channels and valves are realized in silicon wafers by wet chemical etching. Experimental results are presented. Maximum yield and built-up pressure equal 34 ¿l/min and 0.05 atm, at a supply voltage of 6 V. Results of simulations show good agreement with the actual dynamic behaviour of the pump.
Item Type:	Article
Copyright:	© 1990 Elsevier Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/15231
Official URL:	http://dx.doi.org/10.1016/0924-4247(90)85038-6
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