Resonating microbridge mass flow sensor


Bouwstra, Siebe and Legtenberg, Rob and Tilmans, Harrie A.C. and Elwenspoek, Miko (1990) Resonating microbridge mass flow sensor. Sensors and Actuators A: Physical, 21 (1-3). pp. 332-335. ISSN 0924-4247

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Abstract:A resonating microbridge mass flow sensor with a frequency output is presented, based on standard IC and thin-film technologies, and on front-side anisotropic etching. The operation, realization, theory and experiments are described. The sensitivity is compared with that of a resonating membrane prototype. Preliminary results show a base resonance frequency of 85 kHz at a temperature elevation of the microbridge of 20 °C, with a shift of 0.8 kHz in the mass flow range from 0 to 10 sccm.
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Copyright:© 1990 Elsevier Science
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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