Silicon oxynitride planar waveguiding structures for application in optical communication


Ridder, René M. de and Wörhoff, Kerstin and Driessen, Alfred and Lambeck, Paul V. and Albers, Hans (1998) Silicon oxynitride planar waveguiding structures for application in optical communication. IEEE Journal of Selected Topics in Quantum Electronics, 4 (6). pp. 930-937. ISSN 1077-260X

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Abstract:The refractive index of silicon oxynitride (SiON), a widely used material for integrated optics devices, can be chosen in a wide range between 1.45-2.0. We describe how the consequent large design freedom can be exploited on the one hand for a ¿standard¿ polarization independent optical channel waveguide having a favorable tradeoff between efficient fiberchip coupling and small bend radii (compact devices) and on the other hand for special-purpose and hybrid components where the refractive index should be finely adjusted for obtaining the desired functionality. We illustrate the applicability of SiON by describing a few devices for optical filtering in a new architecture for wavelength multiplexing, modulation, polarization splitting and second-harmonic generation
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Copyright:© 1998 IEEE
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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