A review of silicon microphones


Scheeper, P.R. and Donk, A.G.H. van der and Olthuis, W. and Bergveld, P. (1994) A review of silicon microphones. Sensors and actuators A: Physical, 44 (1). pp. 1-11. ISSN 0924-4247

open access
Abstract:Silicon micromachining has successfully been applied to fabricate piezoelectric, piezoresistive and capactive microphones. The use of silicon has allowed the fabrication of microphones with integrated electronic circuitry and the development of the new FET microphone. The introduction of lithographic techniques has resulted in microphones with very small (1 mm2) diaphragms and with specially shaped backplates. The application of corrugated diaphragms seems a promising future development for silicon microphones. It is concluded from a noise consideration that the FET microphone shows a high noise level, which is mainly due to the small sensor capacitance. From this noise consideration, it can be shown that integration of a capacitive microphone and a preamplifier will result in a further reduction of the noise.
Item Type:Article
Copyright:© 1994 Elsevier Science
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15120
Official URL:https://doi.org/10.1016/0924-4247(94)00790-X
Export this item as:BibTeX
HTML Citation
Reference Manager


Repository Staff Only: item control page

Metis ID: 111992