On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones

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Pedersen, M. and Olthuis, W. and Bergveld, P. (1996) On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones. Sensors and Actuators A: Physical, 54 (1-3). pp. 499-504. ISSN 0924-4247

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Abstract:In this paper an alternative approach to the modelling of plates with a large number of holes is presented. By means of plate theory, it is shown that perforated plates can be modelled by conventional orthotropic plates with modified elastic properties. The modification of the elastic constants is derived by equalizing the strain-energy of the perforated and the orthotropic plate. The model obtained is then compared with previous methods and applied in the electrochemical simulation of a silicon micromachined microphone structure. The microphone structures are simulated numerically, using an algorithm based on finite differences.
Item Type:Article
Copyright:© 1996 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15115
Official URL:http://dx.doi.org/10.1016/S0924-4247(95)01189-7
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Metis ID: 111988