An IC-compatible polyimide pressure sensor with capacitive readout


Pedersen, M. and Meijerink, M.G.H. and Olthuis, W. and Bergveld, P. (1997) An IC-compatible polyimide pressure sensor with capacitive readout. Sensors and Actuators A: Physical, 63 (3). pp. 163-168. ISSN 0924-4247

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Abstract:A capacitive differential pressure sensor has been developed. The process used for the fabrication of the sensor is IC-compatible, meaning that the device potentially can be integrated on one chip with a suitable signal-conditioning circuit. A sensor for a differential pressure of ±1 bar has been fabricated and tested with a frequency-modulated detection circuit, and good agreement is found with the theoretical model of the sensor. A nominal sensitivity ¿C/C of 17% has been measured for a positive differential pressure of 1 bar. The resolution of the complete detection system is 2.5 mbar (250 Pa).
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Copyright:© 1997 Elsevier Science
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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