Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5

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Olthuis, W. and Sprenkels, A.J. and Bomer, J.G. and Bergveld, P. (1997) Planar interdigitated electrolyte-conductivity sensors on an insulating substrate covered with Ta2O5. Sensors and Actuators B: Chemical, 43 (1-3). pp. 211-216. ISSN 0925-4005

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Abstract:Interdigitated electrolyte-conductivity sensors with an added top layer of insulating Ta2O5 have been realized. The electrode-substrate structure under the Ta2O5 film has been planarized in order to obtain a totally flat top surface. In addition, the electrodes have been applied on a totally insulating substrate, thus reducing the parasitic sensor capacitance by a factor of ten.
Item Type:Article
Copyright:© 1997 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/15106
Official URL:http://dx.doi.org/10.1016/S0925-4005(97)00157-3
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Metis ID: 111982