A silicon condenser microphone with polyimide diaphragm and backplate

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Pedersen, Michael and Olthuis, Wouter and Bergveld, Piet (1997) A silicon condenser microphone with polyimide diaphragm and backplate. Sensors and Actuators A: Physical, 63 (2). pp. 97-104. ISSN 0924-4247

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Abstract:A new technology for the fabrication of silicon condenser microphones is presented. The technology, which is based on the use of polyimide, can be performed entirely as a post process on substrates already containing integrated circuits. Microphones with an open-circuit sensitivity of 8.1 mV Pa¿1, and a flat frequency response (±2 dB) between 100 Hz and 15 kHz have been fabricated with this technology. The bias voltage used in these measurements is 15 V, and the measured noise level with zero bias is 24 dB SPL, which is sufficient for most acoustic applications, including hearing aids.
Item Type:Article
Copyright:© 1997 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/15081
Official URL:http://dx.doi.org/10.1016/S0924-4247(97)01532-X
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Metis ID: 111966