A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments

Setiadi, D. and Regtien, P.P.L. (1995) A VDF/TrFE copolymer on silicon pyroelectric sensor: design considerations and experiments. Sensors and Actuators A: Physical, 46-47 (1-3). pp. 408-412. ISSN 0924-4247

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Abstract:	For an optimal design of a VDF/TrFE (vinylidene fluoride trifluoroethylene) copolymer-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. Output current and voltage of the sensor are calculated. Improvement of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values.
Item Type:	Article
Copyright:	© 1995 Elsevier Science
Research Group:	Robotics and Mechatronics (CE)
Link to this item:	http://purl.utwente.nl/publications/14696
Official URL:	http://dx.doi.org/10.1016/0924-4247(95)81006-4
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