Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor

Setiadi, D. and Regtien, P.P.L. and Sarro, P.M. (1995) Realization of an integrated VDF/TrFE copolymer-on-silicon pyroelectric sensor. Microelectronic Engineering, 29 (1-4). pp. 85-88. ISSN 0167-9317

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Abstract:	An integrated pyroelectric sensor based on a vinylidene fluoride trifluoroethylene (VDF/TrFE) copolymer is presented. A silicon substrate that contains FET readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. A 3×1 integrated pyroelectric sensor has been realized. Voltage sensitivity and noise of this sensor have been measured.
Item Type:	Article
Copyright:	© 1995 Elsevier Science
Research Group:	Robotics and Mechatronics (CE)
Link to this item:	http://purl.utwente.nl/publications/14693
Official URL:	http://dx.doi.org/10.1016/0167-9317(95)00120-4
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