The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances

Wolffenbuttel, M.R. and Regtien, P.P.L. (1995) The Accurate Measurement of a Micromechanical Force Using Force-Sensitive Capacitances. IEEE Transactions on Instrumentation and Measurement, 44 (2). pp. 188-191. ISSN 0018-9456

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Abstract:	A sensor for the precise and accurate measurement of micromechanical forces is presented. The sensor is based on the capacitive detection of force-induced deflection of a microstructure and integrated charge readout. The mechanical performance of the sensor is evaluated and verified with experiments. The structure has been designed to enable the separation of the force-to-deflection and deflection measurements in order to result in a sensor structure in which the response is linear with force and little affected by fringe fields. The sensor is 0.25 mm2 in size and has a force range of 0.2 mN, a zero-force capacitance of 0.5 pF, a sensitivity of 1-5 fF/uN, and a resolution that corresponds to a capacitance variation of 2 fF
Item Type:	Article
Copyright:	© 1995 IEEE Press
Research Group:	Robotics and Mechatronics (CE)
Link to this item:	http://purl.utwente.nl/publications/14676
Official URL:	http://dx.doi.org/10.1109/19.377806
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