The electrolysis of water: an actuation principle for MEMS with a big opportunity

Neagu, Cristina and Jansen, Henri and Gardeniers, Han and Elwenspoek, Miko (2000) The electrolysis of water: an actuation principle for MEMS with a big opportunity. Mechatronics, 10 (4). pp. 571-582. ISSN 0957-4158

PDF
Restricted to UT campus only: Request a copy
510Kb

Abstract:	In this paper the theory of water electrolysis in a closed electrochemical cell, that contains two electrodes, an electrolyte and a pressure sensor is described. From the leakage and electrochemical experiments done with this macrocell it is possible to obtain information about the applicability of the electrochemical principle in a closed cavity, the choice of the electrodes and electrolyte, and different types of leakage. To control the pressure of the electrochemical actuator automatically, an electronic feedback system was connected to the cell. A value of the pressure is set and the regulator will actuate the electrochemical cell in such a way to get the desired pressure.
Item Type:	Article
Copyright:	© 2000 Elsevier Science
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST) Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/14658
Official URL:	http://dx.doi.org/10.1016/S0957-4158(99)00066-5
Export this item as:	BibTeX EndNote HTML Citation Reference Manager

Repository Staff Only: item control page

Metis ID: 111723