Application of a microflown as a low-cost level-sensor

Honschoten van, J. and Baar van, J. and Bree de, H.E. and Lammerink, T. and Krijnen, G. and Elwenspoek, M. (2000) Application of a microflown as a low-cost level-sensor. Journal of Micromechanics and Microengineering, 10 (2). pp. 250-253. ISSN 0960-1317

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Abstract:	In this paper we present a novel `spirit level' sensor derived from a well known thermal flow sensor. The operation principle is based on the temperature difference of two identical heaters, caused by buoyancy of air. Heating as well as temperature sensing of the structures is carried out using temperature-dependent platinum resistors. Due to its simplicity the sensor is easily fabricated in silicon micro-machining technology. The theory describing the sensor is presented. The first experiments, using dc signals only, show adequate sensitivity, although high-accuracy operation is hampered by thermal drift.
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited 2000
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/14646
Official URL:	http://dx.doi.org/10.1088/0960-1317/10/2/324
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