Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions

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Wiegerink, Remco and Zwijze, Robert and Krijnen, Gijs and Lammerink, Theo and Elwenspoek, Miko (2000) Quasi monolithic silicon load cell for loads up to 1000 kg with insensitivity to non-homogeneous load distributions. Sensors and Actuators A: Physical, A80 (2). pp. 189-196. ISSN 0924-4247

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Abstract:In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 1000 kg. The sensitive surface of 1 cm2 contains a matrix of capacitive sensing elements to make the load cell insensitive to non-homogeneous load distributions. The load cell has been realized and tested. Measurements on a packaged device show an accuracy of 0.2% of full scale limited by the measurement electronics. An accuracy of 0.03% or better is expected to be feasible. The design can be easily adapted for higher loads by increasing the chip area or using multiple chips in a single package.
Item Type:Article
Copyright:© 2000 Elsevier Science
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/14626
Official URL:http://dx.doi.org/10.1016/S0924-4247(99)00265-4
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