Low-cost piezoresistive silicon load cell independent of force ditribution

Zwijze, Robert A.F. and Wiegerink, Remco J. and Krijnen, Gijs J.M. and Lammerink, Theo S.J. and Elwenspoek, Miko (2000) Low-cost piezoresistive silicon load cell independent of force ditribution. Journal of Micromechanics and Microengineering, 10 (2). pp. 200-203. ISSN 0960-1317

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Abstract:	A silicon load cell (force sensor) that is based on a new operating principle is presented. The force is measured by compressing a meander-like strain gage. A second strain gage, which is not loaded, is used for temperature compensation and for compensation of bending and stretching stresses in the chip. Also, the same changes in a zero-load resistor values are eliminated. It is shown that the output of the bridge is a linear function of the total force and independent of the force distribution on the silicon chip. Measurements up to 1000 kg show a linear response and a short-term repeatability to within 0.1%. Creep after 30 min within 1.2%.
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited 2000
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/14622
Official URL:	http://dx.doi.org/10.1088/0960-1317/10/2/317
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