Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

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Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg, A. van den (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of Micromechanics and Microengineering, 9 (2). pp. 194-198. ISSN 0960-1317

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Abstract:Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
Item Type:Article
Copyright:© Institute of Physics and IOP Publishing Limited 1999
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:
Link to this item:http://purl.utwente.nl/publications/14608
Official URL:http://dx.doi.org/10.1088/0960-1317/9/2/322
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