Designing, simulation and realization of in-plane operating micro valves, using new etching techniques

Oosterbroek, R.E. and Berenschot, J.W. and Schlautmann, S. and Krijnen, G.J.M. and Lammerink, T.S.J. and Elwenspoek, M.C. and Berg van den, A. (1999) Designing, simulation and realization of in-plane operating micro valves, using new etching techniques. Journal of Micromechanics and Microengineering, 9 (2). pp. 194-198. ISSN 0960-1317

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Abstract:	Design, simulation, fabrication and measurement results of a new method to fabricate in-plane oriented micro valves with use of an-isotropic wet chemical etching techniques are reported. The method is very engaging due to the simplicity, low demands on cleanroom resources, high accurate controllability and wafer-thickness independence. Integration in micro systems is facilitated by the unique possibility to obtain in-plane working devices. Performed analytical and numerical simulations as well as measurements of a duckbill valve demonstrate the functionality.
Item Type:	Article
Copyright:	© Institute of Physics and IOP Publishing Limited 1999
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST) Biomedical and Environmental Sensor systems (BIOS)
Link to this item:	http://purl.utwente.nl/publications/14608
Official URL:	http://dx.doi.org/10.1088/0960-1317/9/2/322
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