Bi-directional fast flow sensor with a large dynamic range


Bree, Hans-Elias de and Jansen, Henri V. and Lammerink, Theo S.J. and Krijnen, Gijs J.M. and Elwenspoek, Miko (1999) Bi-directional fast flow sensor with a large dynamic range. Journal of Micromechanics and Microengineering, 9 (2). pp. 186-189. ISSN 0960-1317

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Abstract:In this article an extended mass-flow sensor is presented. Apart from the magnitude of the flow, as an add-on to the traditional anemometer, this sensor also measures the direction of the flow. This is of interest for the flow sensor market in general, and more in particular for the safety monitoring of low over-pressure systems like surgeries and cleanrooms where the risk of reverse flow needs to be avoided at all times. It detects the smallest amount of gas-flow, down to approximately 100 µm s-1 airflow up to high flow levels of 1 m s-1. The response time is of the order of milliseconds.
Item Type:Article
Copyright:© Institute of Physics and IOP Publishing Limited 1999
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Metis ID: 111686