Application of a model for silicon resonant sensors

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Prak, Albert and Fluitman, Jan H.J (1994) Application of a model for silicon resonant sensors. Sensors and Actuators A: Physical, 41-42 (1-3). pp. 251-255. ISSN 0924-4247

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Abstract:A recently developed model for excitation and detection mechanisms of silicon resonant sensors is experimentally verified by applying it to practical devices. Various system aspects of resonators with piezoelectric and electrostatic excitation/detection come into focus. The experimental results agree reasonably well with simulation results obtained by the model.
Item Type:Article
Copyright:© 1994 Elsevier Science
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Link to this item:http://purl.utwente.nl/publications/14386
Official URL:http://dx.doi.org/10.1016/0924-4247(94)80119-3
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Metis ID: 111579