Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure

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Gui, Chengqun and Legtenberg, Rob and Elwenspoek, Miko and Fluitman, Jan H. (1995) Q-factor dependence of one-port encapsulated polysilicon resonator on reactive sealing pressure. Journal of Micromechanics and Microengineering, 5 (2). pp. 183-185. ISSN 0960-1317

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Abstract:Micromachined encapsulated polysilicon resonators have been fabricated in different reactive sealing pressure, 200, 50 and 20 mTorr, in order to investigate the dependence of the Q-factors on the sealing pressure. Q-factors as high as 2700 have been measured. The experimental results show that the q-factors of one-port encapsulated resonators are proportional to 1/p and the resonant frequency is independent of the sealing pressure. However, the measured Q-factors are more than two orders of magnitude lower than theoretical prediction.
Item Type:Article
Copyright:© IOP Science 1995
Faculty:
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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Link to this item:http://purl.utwente.nl/publications/14384
Official URL:http://dx.doi.org/10.1088/0960-1317/5/2/034
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Metis ID: 111578