Applications of fluorocarbon polymers in micromechanics and micromachining

Jansen, H.V. and Gardeniers, J.G.E. and Elders, J. and Tilmans, H.A.C. and Elwenspoek, M.C. (1994) Applications of fluorocarbon polymers in micromechanics and micromachining. Sensors and Actuators A: Physical, 41 (1-3). pp. 136-140. ISSN 0924-4247

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Abstract:	Several thin-film deposition and etching techniques of the polymer fluorocarbon are investigated and the resulting thin-film properties will be compared with those of commercially available bulk polytetrafluoroethylene. The most promising deposition technique is performed in a conventional reactive ion etcher using a carbonhydrotrifluoride (CHF3) plasma. By changing the deposition parameters, control of the properties and step coverage of the deposited thin films within a certain range is possible, eg., uni-directional and conformal step coverage of deposited thin films can be obtained. Etching is performed with the help of an evaporated aluminium oxide mask using an oxygen, nitrogen, or sulfurhexafluoride plasma for isotropic etching, or a CHF3 plasma giving a directional etch profile. The combination of the unique properties, deposition and etching techniques make fluorocarbon thin films a promising tool for micromachining; a number of applications will be discussed and demonstrated.
Item Type:	Article
Copyright:	© 1994 Elsevier Science B.V.
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS) Science and Technology (TNW)
Research Group:	Transducers Science and Technology (TST) Mesoscale Chemical Systems (MCS)
Link to this item:	http://purl.utwente.nl/publications/14374
Official URL:	http://dx.doi.org/10.1016/0924-4247(94)80101-0
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