Electrostatically driven vacuum-encapsulated polysilicon resonators part I. design and fabrication

Legtenberg, Rob and Tilmans, Harrie A.C. (1994) Electrostatically driven vacuum-encapsulated polysilicon resonators part I. design and fabrication. Sensors and Actuators A: Physical, 45 (1). pp. 57-66. ISSN 0924-4247

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Abstract:	Basic design issues and a fabrication process based on surface-micromachining techniques for electrostatically driven vacuum-encapsulated polysilicon resonators are presented. A novel freeze-drying method that does not require vacuum equipment is presented. Reactive sealing with LPCVD silicon nitride is used to create the evacuated cavity, resulting in cavity pressures close to the deposition pressure. Design issues regarding choice of materials, technology and layout are discussed. First experimental results, including an admittance plot of the one-port resonator and a plot indicating the dependence of the Q-factor on the resonator geometry and ambient pressure, are presented.
Item Type:	Article
Copyright:	© 1994 Elsevier Science
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/14372
Official URL:	http://dx.doi.org/10.1016/0924-4247(94)00812-4
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