(Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators

Tilmans, H.A.C. and Legtenberg, R. and Schurer, H. and IJntema, D.J. and Elwenspoek, M. and Fluitman, J.H.J. (1994) (Electro-) mechanical characateristics of electrostatically driven vacuum encapsulated polysilicon resonators. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 41 (1). pp. 4-6. ISSN 0885-3010

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Abstract:	The design, fabrication and performance of vacuum-encapsulated electrostatically driven polysilicon resonating beams, 210-510 um long, 100 um wide, and 1.5 um thick, are described. The shortest beams have a fundamental frequency of 324 kHz, a gauge factor of 2400 and a quality factor of 600 at cavity pressures of 0.15 mbar. Intrinsic quality factors of 18000 were measured below 0.01 mbar.
Item Type:	Article
Copyright:	© 1994 IEEE
Faculty:	Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/14364
Official URL:	http://dx.doi.org/10.1109/58.265813
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Metis ID: 111568