Mechano-optical waveguide on-off intensity modulator

Veldhuis, G.J. and Gui, C. and Nauta, T. and Koster, T.M. and Berenschot, J.W. and Lambeck, P.V. and Gardeniers, J.G.E. and Elwenspoek, M. (1998) Mechano-optical waveguide on-off intensity modulator. Optics Letters, 23 (19). pp. 1532-1534. ISSN 0146-9592

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Abstract:	High-extinction on-off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on-off intensity modulator. On-off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm × 4 mm device for a wavelength of 632.8nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding.
Item Type:	Article
Copyright:	© 1998 Optical Society of America
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/14300
Official URL:	http://dx.doi.org/10.1364/OL.23.001532
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