Fabrication and packaging of integrated chemo-optical sensors


Heideman, R.G. and Veldhuis, G.J. and Jager, E.W.H. and Lambeck, P.V. (1996) Fabrication and packaging of integrated chemo-optical sensors. Sensors and Actuators B: Chemical, 35 (1-3). pp. 234-240. ISSN 0925-4005

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Abstract:This paper describes the design and fabrication of a sensitive integrated chemo-optical sensor supplied with on-chip fiber-to-waveguide connectors. The sensor is designed for TE-polarized light with wavelength of 633 nm. The fiber-to-chip connectors are based on easily fabricated silicon V-grooves combined with a smooth sawcut. The sawcut is defining the channel waveguide endface. The sensor is based on a phase modulated Mach-Zehnder interferometer, using the electro-optic effect of the waveguiding material zinc oxide (ZnO). The fiber-to-chip connector units have a typical coupling efficiency of 0.1¿1%. The electro-optical voltage × length product V¿ is 15 ± 4 V cm at frequencies above 100 Hz. Preliminary experiments on the general (passive) sensor response showing its expected high sensitivity are discussed.
Item Type:Article
Copyright:© 1996 Elsevier Science
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Link to this item:http://purl.utwente.nl/publications/14283
Official URL:https://doi.org/10.1016/S0925-4005(97)80061-5
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