Isotropically etched channels for gas chromatography

Tjerkstra, R.W. and Gardeniers, J.G.E. and Berg van den, A. and Elwenspoek, M.C. (1996) Isotropically etched channels for gas chromatography. Analytical Methods and Instrumentation . pp. 247-249. ISSN 1063-5246

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Item Type:	Article
Copyright:	© 1996 Wiley
Faculty:	Science and Technology (TNW) Electrical Engineering, Mathematics and Computer Science (EEMCS)
Research Group:	Mesoscale Chemical Systems (MCS) Biomedical and Environmental Sensor systems (BIOS) Transducers Science and Technology (TST)
Link to this item:	http://purl.utwente.nl/publications/14209
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