The μ-flown: a novel device for measuring acoustic flows


Bree, Hans-Elias de and Leussink, Peter and Korthorst, Twan and Jansen, Henri and Lammerink, Theo S.J. and Elwenspoek, Miko (1996) The μ-flown: a novel device for measuring acoustic flows. Sensors and Actuators A: Physical, 54 (1-3). pp. 552-557. ISSN 0924-4247

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Abstract:An acoustic wave consists of two elements, the acoustic pressure and the acoustic flow. Up to now one has to measure the pressure and calculate the flow to determine the acoustic flow, so it would be convenient to have a sensor that is able to measure acoustic flows. At the University of Twente a novel device has been developed which fulfils this need. In this paper a short introduction to the governing principles of this dynamic flow sensor, the fabrication process, the electronics and some of its interesting applications will be presented. This micromachined device measuring acoustic flows is called the microflown or μ-flown.
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Copyright:© 1996 Elsevier Science
Electrical Engineering, Mathematics and Computer Science (EEMCS)
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