Pulsed-laser deposited ZnO for device applications

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King, Simon L. and Gardeniers, J.G.E. and Boyd, Ian W. (1996) Pulsed-laser deposited ZnO for device applications. Applied Surface Science, 96-98 . pp. 811-818. ISSN 0169-4332

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Abstract:The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored.
Item Type:Article
Copyright:© 1996 Elsevier Science
Faculty:
Science and Technology (TNW)
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Link to this item:http://purl.utwente.nl/publications/14192
Official URL:http://dx.doi.org/10.1016/0169-4332(96)80027-4
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