Back to University of Twente portal
Pulsed-laser deposited ZnO for device applications
King, Simon L. and Gardeniers, J.G.E. and Boyd, Ian W. (1996) Pulsed-laser deposited ZnO for device applications. Applied Surface Science, 96-98 . pp. 811-818. ISSN 0169-4332
![[img]](http://doc.utwente.nl/style/images/fileicons/application_pdf.png)
| PDF 603Kb |
| Abstract: | The study investigates the growth by pulsed-laser deposition (PLD) of ZnO thin films for the eventual incorporation into piezo-electric actuators and other sensors being developed at the University of Twente. All films are purely c-axis oriented, and results are presented which suggest the production of some of the highest quality ZnO thin films yet reported. These include films with rocking curve full-width half-maxima (FWHM) down to 1.2° and (002) 2¿ peak FWHM (corrected) of 0.085°. Principally, X-ray diffraction analysis is detailed, and the shift in (002) peak position with changing deposition conditions is explored. |
| Item Type: | Article |
| Copyright: | © 1996 Elsevier Science |
| Faculty: | Science and Technology (TNW) |
| Research Group: | |
| Link to this item: | http://purl.utwente.nl/publications/14192 |
| Official URL: | http://dx.doi.org/10.1016/0169-4332(96)80027-4 |
| Export this item as: | BibTeX EndNote HTML Citation Reference Manager |
Show download statistics for this publication
Show download statistics for this publicationRepository Staff Only: item control page
Metis ID: 111483