Modeling, design and realization of microfluidic components


Oosterbroek, Rijk Edwin (1999) Modeling, design and realization of microfluidic components. thesis.

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Abstract:During the last decades, miniaturization of electrical components and systems has assumed large proportions. The reason for these developments is the application of etch and deposition techniques in the IC-production (integrated circuit), which allows a large amount of functionality per surface area. The IC-production techniques can also be used for the fabrication of functional elements, operating in other physical domains. This has led to the research area of micromechanics. With use of existing and to specific demands adapted or newly developed etch and deposition techniques, miniaturized sensors and actuators can be obtained with typical dimensions in the order of microns to millimeters. The described micromechanics research is carried out at the Micromechanical Transducers Group of the Faculty of Electrical Engineering, University of Twente and took place within the fast growing area of μTAS: micro Total Analysis Systems. The aim of the research is to design miniaturized chemical analysis systems by applying micromechanical fabrication methods to exploit the benefits from downscaling. These advantages can be: reduction of analysis costs, obtaining more compact, energy and reagents economical systems, performing a faster and / or more precise analysis, or performing of chemical analysis which are difficult or not possible with “macrosystems”. The research is focussed in particular on modeling, designing and fabrication of components of a μTAS. The effects of downscaling on the influence of the different physical mechanisms on the behavior of microcomponents can be well analyzed with use of dimensionless numbers
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