SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique

Kim, B.J. and Liebau, M. and Huskens, J. and Reinhoudt, D.N. and Brugger, J.P. (2000) SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique. In: Micro- and Nano-Engineering 2000, September 18–21, 2000, Jena, Germany.

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Item Type:	Conference or Workshop Item
Faculty:	Science and Technology (TNW)
Research Group:	Molecular Nanofabrication (MNF)
Link to this item:	http://purl.utwente.nl/publications/13195
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