SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique

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Kim, B.J. and Liebau, M. and Huskens, J. and Reinhoudt, D.N. and Brugger, J.P. (2000) SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique. In: Micro- and Nano-Engineering 2000, September 18–21, 2000, Jena, Germany.

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