SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique
Kim, B.J. and Liebau, M. and Huskens, J. and Reinhoudt, D.N. and Brugger, J.P. (2000) SAMs meet MEMS - A new monolayer assisted surface microfabrication and release technique. In: Micro- and Nano-Engineering 2000, September 18–21, 2000, Jena, Germany.
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|Item Type:||Conference or Workshop Item|
Science and Technology (TNW)
|Link to this item:||http://purl.utwente.nl/publications/13195|
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